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XLR 1000ix

Cymer Southeast Asia LtdTaiwan

Cymer’s XLR 1000ix is the latest in advanced light source technology; The XLR 1000ix introduces higher repetition rate of 6.75kHz, first light source of this category in market, enabling a 36% reduction in speckle contrast and improvement…

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About this product

Cymer’s XLR 1000ix is the latest in advanced light source technology

The XLR 1000ix introduces higher repetition rate of 6.75kHz, first light source of this category in market, enabling a 36% reduction in speckle contrast and improvement in local dose variation and local CDU.

It also delivers productivity and cost-of-ownership improvements, enabling a 20% increase in time between service intervals enabling a single touch per year. This is driven by Cymer’s newly developed field-tested chamber and optics modules to support new functionalities.

Further improvements in Bandwidth Control with DynaPulse™ 3,  provides enhanced control in wafer processing.

The system has been empowered with He-Free operation and ADAPT™, a holistic machine learning technology to increase availability through fewer calibrations and gas refresh events while enabling sustainability improvements through lower power and gas consumption.

First generation 6.75Khz light source.

6th generation chamber technology to enable higher repetition rate and availability.

Higher Nslit for improved dose variation on chipmaker’s wafer