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XLR 700 (Dry)

Cymer’s XLR 700 is the latest in flexible light source technology for ArF dry lithography.; The XLR 700 provides chipmakers tighter bandwidth control (300 +/-5fm) that essentially eliminates bandwidth as a source of process variation for…

About this product

Cymer’s XLR 700 is the latest in flexible light source technology for ArF dry lithography.

The XLR 700 provides chipmakers tighter bandwidth control (300 +/-5fm) that essentially eliminates bandwidth as a source of process variation for on-wafer performance. Cymer’s patented technology applies high-speed closed loop control resulting in extremely stable performance.

XLR 700 (Dry) | Cymer Southeast Asia Ltd