XLR 700ix

About this product

When chipmakers looked for an immersion light source solution for 14 nm patterning, Cymer delivered the 700ix.

Built on the recirculating ring technology of the XLR platform, the 700ix provides improvements in bandwidth, wavelength and energy stability, enabling higher scanner throughput and process stability for advanced chip manufacturing.

The XLR 700ix provides chipmakers tighter bandwidth control (300 +/- 5 fm wafer average) that essentially eliminates bandwidth as a source of process variation for on-wafer performance. Cymer’s patented technology applies high-speed closed loop control, resulting in extremely stable performance.