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XLR 800ix

Cymer’s XLR 800ix is a key light source enabling chipmakers worldwide.; The XLR 800ix introduces new bandwidth stabilization technology, enabling an eight times improvement in bandwidth measurement fidelity, which can be used to tightly…

About this product

Cymer’s XLR 800ix is a key light source enabling chipmakers worldwide.

The XLR 800ix introduces new bandwidth stabilization technology, enabling an eight times improvement in bandwidth measurement fidelity, which can be used to tightly control bandwidth stability. It also delivers productivity and cost-of-ownership improvements, enabling a 33% increase in time between service intervals to 40 billion pulses. This is driven by Cymer’s new field-tested chamber and optics modules, which are in production in more than 250 XLR systems. These enhancements also support Cymer’s sustainability initiatives, by lowering total system power consumption by several percentage points.

Advanced chamber technology to enable higher availability

Advanced bandwidth control options for next generation nodes

New service metrology for faster return to production

DynaPulse™ 2 Bandwidth Control

Tunable Bandwidth

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