XLR 900ix

About this product

Cymer’s XLR 900ix is the latest in advanced light source technology.

The XLR 900ix introduces new speckle reduction technology, enabling a 30% reduction in speckle contrast and enabling significant local CDU improvement. It also delivers productivity and cost-of-ownership improvements, enabling a 25% increase in time between service intervals enabling a single touch per year. This is driven by Cymer’s new field-tested chamber and optics modules, which are in production in more than 140 XLR systems. The system also features new machine learning technology to increase availability through fewer calibrations and gas refresh events while enabling sustainability improvements through lower power and gas consumption.

5th generation chamber technology to enable higher availability

Optical pulse stretching technology to improve local CDU

DynaPulse™ 2 bandwidth control technology